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Product Introduction
Brief Introduction:
13.56MHz RF generator up to 500W for DIY of PECVD (Plasma Enhanced Chemical Vapor Deposition) for Plasma etching, Plasma cleaning, and plasma polymerization etc.
Technical Parameter:
| Plasma RF Power
supply |
Output Power | 5 -500W adjustable with ± 1% stability |
| RF frequency | 13.56 MHz ±0.005% stability | |
| Reflection Power | 200W max. | |
| Matching | Automatic | |
| RF Output Port | 50 Ω, N-type, female | |
| Noise | <50 dB. | |
| Cooling | Air cooling. | |
| Power | 220V, 50Hz |
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