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Product Introduction
Brief Introduction:
It is designed to mix and deliver 3 different gases to the our CVD system at a low cost. The system is installed in a heavy-duty mobile cart where a tube furnace can be placed on top of it. The flow rates are adjustable via three float flow meters.
Technical Parameter:
| Flow rate | A: 10 - 100 mL/min
B: 16 - 160 mL/min C: 25 - 250 mL/min Accuracy：+- 1.5% （F.S.) |
| Mechanical Pressure Gauge (mixing tank) | -0.1-0.15 MPa, (0.01 MPa/grit) |
| Gas Mixing Tank | SS304 |
| Gas Schematics | Three needle valves for three gas inlets
One valve for a gas outlet |
| Gas Inlets and Outlets | 1/4" compression tube fittings
12' length 1/4" PTFE pipe is included for immediate use |
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