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Compact Sliding CVD Furnace with 2" Tube and Vacuum Pump
Chemical vapor deposition (CVD) is a film growth technique that make gaseous substance containing thin films react by means of a glow discharge. According to experimental requirements, Our company de...
Brief Introduction:
Chemical vapor deposition (CVD) is a film growth technique that make gaseous substance containing thin films react by means of a glow discharge. According to experimental requirements, Our company designed this equipment to meet the needs of various types of film study.
Technical Parameter
| Tube Furnace
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Display | LED |
| Chamber | Split type and upper part can be opened
Manual sliding chamber |
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| Max. Temperature | 1200°C (for limiting) | |
| Continuous Woking Temp. | ≤1100℃ | |
| Heating Rate | Suggestion: 0~10℃/min (max. 20℃/min)
If use temp. Controller. Can also achieve fast heating and cooling by by pre-heat one side of processing tube to the target temperature and then slide the furnace to the other side. You may choose to place the sample in the pre-heat area or not. |
|
| Temperature Zone | 200mm | |
| Heating Element | Fe-Cr-Al Alloy doped by Mo | |
| Thermocouple | N type | |
| Temperature Control Accuracy | ±1℃ | |
| Tube Size
|
OD 50 mm x (1000-1200mm) length | |
| Material: Quartz Tube
High purity fused quartz tube Size: OD: 2" x ID: 1.81" x Length: 39" (inch) (50 mm OD x 44mm ID x 1000 mm L） Two foam ceramic blocks are included which must be placed inside tube to avoid heat radiation damaging the O-rings |
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| Temperature Controller | 30 programmable segments for precise control of heating rate, cooling rate and dwell time.
Built-in over temperature alarm and protection allows for operation without an attendant. A n-type thermal couple is built in the furnace to control furnace temperature |
|
| Heating curves | 30 steps programmable | |
| Vacuum Flange | Stainless Steel vacuum flange with valve | |
| Power | 220V 50 Hz single phase at max. 3KW | |
| Sliding Rails / Table | Double sliding rail made
Sliding length: 1200 mm |
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| Vacuum Pump
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Rotary Vane Vacuum Pump | vacuum inside the tube is around 10-1 Torr.
The rotary vane vacuum pump will be designed into a cart with wheel. |
| Mass Flow Meters | Three precision mass flow meters :
MFC 1: 0-500sccm MFC 2 :0-500sccm MFC 3 :0-500sccm MFC 4:0-500sccm One gas mixing tank is installed on bottom case with 4 stainless steel needle valves is installed on left side of bottom case to control 4 type gases mixing manually |
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| Digital Vacuum Gauge | 3.8x10-5 to 1125 Torr measurement range
Anti-corrosive, gas-type independent |
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Note: Different tube sizes and temperature are available based on your requirement, please contact us freely if there is any specific requirement.
