Categories
Latest Products
Dual Zones CVD Furnace with Digital Vacuum Gauge and Vacuum Pump
Chemical vapor deposition (CVD) is a film growth technique that make gaseous substance containing thin films react by means of a glow discharge. According to experimental requirements, Our company de...
Brief Introduction:
Chemical vapor deposition (CVD) is a film growth technique that make gaseous substance containing thin films react by means of a glow discharge. According to experimental requirements, Our company designed this equipment to meet the needs of various types of film study.
Technical Parameter:
| Tube Furnace | LCD touch screen | |
| Chamber | Split type | |
| Max. Temperature | 1200℃ for short time | |
| Continuous Working Temp. | ≤1100℃ | |
| Heating Rate | Suggestion: 0~10℃/min (max. 20℃/min) | |
| Temperature Zone | Two zones: 200+200mm | |
| Heating Element | Resistance Wire with Mo | |
| Thermocouple | N type | |
| Temperature Control Accuracy | ±1℃ | |
| Tube Size | 60 x 1200mm (OD x L) | |
| Material: Quartz | ||
| Temperature Control | PID automatic control via SCR power control | |
| Heating curves | 30 steps programmable | |
| Vacuum Flange | Stainless Steel vacuum flange with valve | |
| Power | 220V, 50 Hz, single phase at max. 4KW | |
| Vacuum Pump System
|
Rotary Vane Vacuum Pump(Include KF25 Adpater, bellow for vacuum pump and cart with wheel, System with automatic solenoid valve) | Ultimate vacuum 10-3 Torr. And vacuum inside the tube is around 10-1 Torr.
Flow rate: 8CFM (4L/S, 240L/min)
|
| Mass Flow meters | 4 precision mass flow meters :
MFC 1: Gas flow range from 0~100 sccm MFC 2&3: Control range from 0~200 sccm MFC 4: Range from 0~500 sccm (or according to your requirement) One gas mixing tank is installed on bottom case with liquid release valve 4 stainless steel needle valves is installed on left side of bottom case to control 4type gases mixing manually |
|
| Inficon Digital Vacuum Gauge | 3.8x10-5 to 1125 Torr measurement range
Anti-corrosive, gas-type independent |
|
Note: Different Tube Sizes and temperature are available based on your requirement, pls contact us freely if there is any specific requirement.
